Surface morphology、Dimension Measurement表面形貌、尺寸量测Optical profiler, SEM, TEMFilm type and thickness薄膜类型及薄膜厚度SEM/EDS, TEM/EDSQ-well structure量子井结构分析SEM/EDS, TEM/EDSDefects (Dislocations)缺陷分析TEMQ-Well Periodic Doping Profile量子井周期掺杂分布SIMSDefect Isolation缺陷定位EMMI...